TEAM

People behind
the next layer.

Expertise across thin-film processes, computational modeling and ALD energy applications.

Thin-film processes & technology ↓Theory & simulation ↓ALD for energy applications ↓

EXPERTISE

Thin-film processes & technology

Surface chemistry, selective deposition, ALD devices and thin-film characterization.

Portrait of Rong Chen

Rong Chen

Professor

Bachelor’s degree: University of Science and Technology of China. Master’s and PhD: Stanford University. Senior technical roles: Applied Materials and Intel.

Honors: Changjiang Scholar; national Ten Thousand Talents leading talent; overseas young talent program.

Research focusAtomic layer deposition methods, processes and equipment.

Portrait of Kun Cao

Kun Cao

Professor

Bachelor’s, master’s and PhD degrees: Huazhong University of Science and Technology. Postdoctoral research experience.

Research focusSelective deposition processes and applications.

Portrait of Fan Yang

Fan Yang

Associate Researcher

Bachelor’s degree: Huazhong University of Science and Technology. Master’s: Institute of Microelectronics. PhD in Spain; postdoctoral research in San Diego, USA.

Research focusALD processes and devices; spatial ALD (SALD).

Portrait of Xiaodong Zhang

Xiaodong Zhang

Associate Professor

Bachelor’s degree: Beihang University. PhD: Duke University. Postdoctoral work: Harvard University.

Research focusHigh-vacuum thin-film deposition processes and characterization.

EXPERTISE

Theory & simulation

Computational methods connecting atomistic reactions and engineering-scale behavior.

Portrait of Bin Shan

Bin Shan

Professor

Bachelor’s degree: Tsinghua University. PhD: Stanford University.

Research focusMultiscale computational methods and force-field simulation.

Portrait of Yuan Gao

Yuan Gao

Professor

Bachelor’s degree: Shanghai Jiao Tong University. PhD: University of Virginia (UVA). Postdoctoral work: University of Illinois Urbana-Champaign (UIUC).

Honor: overseas outstanding young talent program.

Research focusFinite element simulation and molecular dynamics.

Portrait of Yanwei Wen

Yanwei Wen

Associate Professor

Bachelor’s, master’s and PhD degrees: Wuhan University. Postdoctoral work: Huazhong University of Science and Technology.

Research focusDensity functional theory (DFT) and microkinetics.

EXPERTISE

ALD for energy applications

Particle coatings and ALD materials for new-energy and catalytic applications.

Portrait of Xiao Liu

Xiao Liu

Associate Professor

Bachelor’s, master’s and PhD degrees: Huazhong University of Science and Technology. Postdoctoral research experience.

Research focusParticle atomic layer deposition and new-energy applications.

Portrait of Chun Du

Chun Du

Associate Professor

Bachelor’s degree: University of Science and Technology of China. PhD: Boston College.

Research focusALD materials for catalysis in new-energy applications.